ultrasonic photoresist coating

Type: Ultrasonic Photoresist Coating System Model: USP6000,USP6000WS Params: Operating frequency: 25–180 kHz Flow rate: 0.001–50 mL/min Droplet size: 18–200 μm (frequency dependent) Film thickness: 20 nm–100 μm Coating uniformity: High-uniformity, edge-to-edge coating Atomization: Non-clogging ultrasonic spray Material: Stainless steel / titanium alloy Applicable Industry: Semiconductor Manufacturing MEMS Manufacturing Microelectronics Printed Electronics Wafer Processing Optoelectronics Research & Development Semiconductor Wafers Industry