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Etch ring
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Semicera
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Etch ring
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SKU:
5757773561
Model:
Etch ring
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Product Details
Material Base: Pure CVD Solid SiC or High-Purity Silicon Single Crystal Plasma Erosion Rate: < 2 nm/min (Under high-density CF4/O2 plasma) Flatness Tolerance: <= 10 um Total Metal Purity: < 5 ppb (Parts per billion)