What Can Wuxi Zhanghua‘s Three-in-One Equipment Do for Thin Film Deposition Processes？

What Can Wuxi Zhanghua‘s Three-in-One Equipment Do for Thin Film Deposition Processes？

In the grand narrative of thin film deposition technologies （PVD， CVD， ALD）， core processes such as photolithography， etching， and deposition often occupy the technological spotlight. However， a critical yet easily overlooked step—the purification and post-processing of high-purity precursor materials for thin film deposition—directly determines the purity of deposited films and the ultimate performance of devices.

The Filtration-Washing-Drying “Three-in-One” equipment （Agitated Nutsche Filter Dryer， ANFD） from Wuxi Zhanghua Pharm & Chem Equipment Co.， Ltd. plays an irreplaceable role in precisely this stage.

I. Positioning of the Three-in-One Equipment in the Thin Film Deposition Industry Chain

Thin film deposition processes rely heavily on high-purity precursor materials—whether they are PVD targets， or CVD/ALD metal-organic precursors， silicon-based precursors， etc. The production of these precursor materials typically follows the process flow of “Synthesis → Filtration & Washing → Drying → Purification/Packaging.”

The Three-in-One equipment serves precisely this “post-synthesis purification” critical step， with the following specific functions：

 Process Step  Function  Impact on Film Quality

 Solid-Liquid Separation  Separate solid precursors from mother liquor in synthesis solution  Remove residual reactants and byproducts from mother liquor， preventing them from being carried into the deposition chamber

 Displacement Washing  Wash filter cake with high-purity solvent to displace residual impurity ions  Remove metallic ions （Na， K， Fe， Cu， etc.） and halide ions， preventing impurity defects in films Vacuum Drying  Remove solvent and moisture under sealed conditions to obtain high-purity dry powder  Control moisture content to prevent precursor hydrolysis or oxidation， ensuring deposition process stability

The core advantage of the Three-in-One equipment lies in integrating the above three steps within a single sealed vessel， eliminating material transfer throughout the entire process—fundamentally preventing exposure， moisture absorption， oxidation， and secondary contamination during transfer. This perfectly aligns with the stringent purity requirements of semiconductor-grade precursors.

Wuxi Zhanghua Pharm & Chem Equipment Co.， Ltd. is precisely based on this philosophy that it provides high-cleanliness， fully sealed process equipment solutions for semiconductor precursor manufacturers.

II. How the Three-in-One Equipment Empowers Specific Precursor Material Production

(I) Purification of CVD/ALD Precursors

CVD and ALD processes demand extremely high precursor purity. For example， the copper（I） hexafluoroacetylacetonate-cyclooctadiene precursor used for CVD deposition of copper oxide films requires a metal purity above 99.99%， an effective purity exceeding 99%， and must be fully volatile below 200°C. Similarly， precursors for silicon-containing film deposition （such as bis（disilylamino）silane） need to achieve purity above 98% to meet semiconductor application requirements.

Through fully sealed filtration and washing and gentle vacuum drying， the Three-in-One equipment can effectively remove residual impurity ions and solvents from the synthesis process， ensuring that precursor metal purity and thermal stability meet the stringent standards of ALD/CVD processes.

The Three-in-One equipment from Wuxi Zhanghua Pharm & Chem Equipment Co.， Ltd. has been validated in multiple semiconductor material manufacturing facilities.

(II) Post-Processing of ALD Precursor Materials

ALD， as an atomic-level precision deposition technology， imposes extremely strict requirements on precursor metallic ion content and particle size. In the production of semiconductor precursors， post-synthesis materials must undergo fine filtration， washing to remove metallic ions， and vacuum low-temperature drying to obtain high-purity products that meet ALD requirements.

The Three-in-One equipment can perform filtration， washing， and drying of thermally sensitive or moisture/oxygen-sensitive precursors under fully sealed， inert gas atmosphere， reducing metallic ion content to ppb or even ppt levels， providing “atomically clean” raw material assurance for ALD processes.

Wuxi Zhanghua Pharm & Chem Equipment Co.， Ltd. possesses extensive experience in processing Hastelloy， titanium， and PTFE/PFA linings， capable of meeting the process requirements of various corrosive media.

(III) Cleaning of Precursor Supporting Containers （Extended Application）

It is worth noting that in the thin film deposition industry chain， besides the precursors themselves requiring high purity， the cylinders/containers used for storing and transporting precursors also demand extremely high cleanliness. Public documents from Bozhong Precision show that the semiconductor industry‘s requirements for precursor cylinder cleaning systems include： helium leak ≤1×10⁻⁷ mbar·L/s， moisture content ＜10ppb， oxygen content ＜10ppb， particles （≥0.5μm） ≤10pcs/mL， total metallic impurities single metal ion ≤1ppb， TOC ≤100ppb.

Although the Three-in-One equipment does not directly clean cylinders， its fully sealed， high-cleanliness design philosophy and surface treatment capabilities （e.g.， mirror polishing Ra≤0.4μm） can technically be extended to purification systems for precursor containers， demonstrating the process value of the Three-in-One equipment in the high-purity semiconductor materials field.

The precision surface treatment technology of Wuxi Zhanghua Pharm & Chem Equipment Co.， Ltd. can provide reliable assurance for high-purity applications.

III. Deep Correlation Between the Three-in-One Equipment and Thin Film Deposition Processes

 Thin Film Deposition Technology  Required Precursors/Materials  Role of Three-in-One Equipment

PVD（ Magnetron Sputtering） 、 High-purity metal targets， alloy targets  Powder purification of target materials （filtration， washing， drying）

CVD（LPCVD/PECVD） Silicon-based precursors （TEOS， DCS， etc.）， metal-organic precursors  Solid-liquid separation after precursor synthesis， washing to remove impurity ions， vacuum low-temperature drying

ALD High-K、 High-K precursors （TMA， HfCl₄， etc.）， metal-organic precursors Displacement washing of precursors （removing Cl⁻， metallic ions）， vacuum drying

MOCVD  Metal-organic compounds （TMGa， TMIn， etc.）  Fully sealed filtration and drying of moisture/oxygen-sensitive metal-organic precursors

It is particularly worth noting that metal-organic precursors used in advanced processes such as ALD are often extremely sensitive to air and moisture. The Three-in-One equipment can be equipped with inert gas protection systems and high-vacuum drying systems to ensure that such materials do not decompose， oxidize， or absorb moisture during post-processing—thereby guaranteeing their stability in precursor cylinders and the reliability of subsequent deposition processes.

Wuxi Zhanghua Pharm & Chem Equipment Co.， Ltd. can provide complete inert gas protection and high-vacuum drying solutions.

IV. Conclusion

Although Wuxi Zhanghua‘s Three-in-One equipment does not directly participate in the thin film deposition process， it provides “raw material assurance” for thin film deposition processes.

Through fully sealed integrated design， efficient displacement washing capability， gentle vacuum drying method， and stringent material and surface treatment standards， the Three-in-One equipment serves the post-production processing of CVD/ALD precursors. Its value in ensuring film quality is holistic—without high-purity precursors， even the most sophisticated deposition equipment cannot produce high-quality films.

Wuxi Zhanghua Pharm & Chem Equipment Co.， Ltd.， founded in 1976， has been dedicated to the R&D and manufacturing of core process equipment for reaction， crystallization， filtration， and drying for nearly five decades. Leveraging its extensive experience in processing specialty materials including Hastelloy， titanium， and PTFE/PFA linings， as well as international certifications including ASME， CE， PED， and ATEX， Wuxi Zhanghua‘s Three-in-One equipment has been validated in semiconductor material manufacturing， providing critical process equipment support for the stable mass production of high-purity precursors.