Lobster200Z300S-T0X5-C Wafer Robot

Type

One-armed

Applied Specification

~300

Rated Payload

0.5KG

Degree of Freedom

3

Range of Motion

Lifting Axis (Z)

300mm

Rotating Axis (T)

340deg

Stretching Axis (R)

400mm

Maximum Speed

Lifting Axis (Z)

400mm/s

Rotating Axis (T)

260deg/sec

Stretching Axis (R)

1700mm/s

Features

1) Cleanroom environment.

2) Robotic Arm Length: 200mm.

3) The whole axes adopt servo motors to meet the needs of highspeed handling.

4) Mapping Sensor to detect if wafers are there, if overlying or tilting.

5) Specifications can be customized according to requirements.

Re-positioning Accuracy

±0.1mm

Leak Rate

—

Cleanliness

Class 100

Interface

I/O interface

4 configurable digital inputs;

4 configurable digital outputs;

8 general digital inputs;

8 general digital outputs;

(Re-extensible 8 digital inputs/outputs).

Ethernet

1

USB

2

RS232/RS485

1

Communication Protocol

Modbus-RTU/TCP、Socket

Arm Length (R)

200mm

Vertical Stroke (Z)

300mm

Machine Table Height (H)

620mm

Actuator Length (L)

Demand-based

Height from Table to Stroke’s Down Position (H)

128mm