Lobster200Z300S-T0X5-V Wafer Robot

Type

One-armed

Applied Specification

~300

Rated Payload

0.5KG

Degree of Freedom

3

Range of Motion

Lifting Axis (Z)

300mm

Rotating Axis (T)

340deg

Stretching Axis (R)

400mm

Maximum Speed

Lifting Axis (Z)

300mm/s

Rotating Axis (T)

400deg/sec

Stretching Axis (R)

700mm/s

Features

1) Vacuum environment.

2) Robotic Arm Length: 200mm.

3) Direct drive, compact structure

4) Mapping Sensor to detect if wafers are there, if overlying or tilting.

5) Specifications can be customized according to requirements.

Re-positioning Accuracy

±0.1mm

Leak Rate

1*10E-6 Pa

Cleanliness

ISO Class1

Interface

I/O interface

4 configurable digital inputs;

4 configurable digital outputs;

8 general digital inputs;

8 general digital outputs;

(Re-extensible 8 digital inputs/outputs).

Ethernet

1

USB

2

RS232/RS485

1

Communication Protocol

Modbus-RTU/TCP、Socket

Arm Length (R)

200mm

Vertical Stroke (Z)

150mm

Machine Table Height (H)

868mm

Actuator Length (L)

Demand-based

Height from Table to Stroke’s Down Position (H)

120mm