Micro Thermal Mass Flow Meter SRK-DL for Semiconductor and Medical
The SRK-DL micro thermal mass flow meter delivers unmatched precision for low-flow gas measurement, with a range of 2 sccm to 30 SL/M. Its compact design and high sensitivity make it the preferred choice for critical applications in semiconductor manufacturing, medical devices, analytical instruments, fuel cells, and environmental monitoring.
Key Selling Points
Precision at Micro Flows: Measures flows as low as 2 sccm, essential for precise gas control in semiconductor and medical processes.
High Accuracy: ±1% F.S. accuracy ensures repeatable and reliable measurements critical for R&D and production.
Multiple Communication Options: Supports RS232/485 and MODBUS for seamless integration into automated systems.
Compact and Robust Design: Stainless steel construction with small footprint fits into space-constrained equipment.
Versatile Power Supply: Operates on ±15VDC or 24VDC, flexible for various system architectures.
Technical Specifications
Parameter
Value
Flow Range
2 sccm ~ 30 SL/M
Accuracy
± 1% F.S.
Output Signal
0~5V, 4-20mA, 1-5V
Communication
RS232/485, MODBUS
Power Supply
±15VDC, 24VDC
Material
Stainless Steel
Models and Options
The SRK-DL model can be customized with different flow ranges, output signals, and process connections to fit specific OEM requirements. Contact us to discuss your application.
Materials and Structure
Constructed from stainless steel for excellent chemical compatibility and durability. The sensor is designed with a low dead volume to minimize contamination and ensure fast response.
Applications
Semiconductor process gas delivery and control
Medical device gas flow measurement (e.g., ventilators, anesthesia)
Analytical instruments (e.g., gas chromatography)
Fuel cell hydrogen flow control
Environmental monitoring of trace gases
Customization
We offer tailored solutions for flow range, output signal, communication protocol, and process connections. Our engineering team can also develop custom calibration for specific gas mixtures.
Case Study
Long-Term Air Leak Detection in Critical Process
A client used the SRK-DL for 2 sccm low flow air measurement with 3 units to detect air leakage down to 2 ml/min. The meters have operated reliably for over 10 years, demonstrating exceptional sensitivity and stability for demanding applications.
FAQ
Q1: What is the minimum measurable flow?
The SRK-DL can measure flows as low as 2 sccm, making it ideal for micro-flow applications.
Q2: Can it be used with corrosive gases?
The standard model features stainless steel wetted parts. For corrosive gases, special materials and seals are available upon request.
Q3: Does it support digital communication?
Yes, RS232, RS485, and MODBUS are available for integration with PLCs and SCADA systems.
Q4: What is the typical response time?
Response time is fast due to the thermal sensing principle, typically within milliseconds for flow changes.
Q5: How is the meter calibrated?
Each unit is calibrated before shipment using NIST-traceable standards. Re-calibration services are available.
Q6: What is the warranty period?
We provide a standard 12-month warranty on all products. Extended warranty options are available.
Q7: Can the output be configured for 4-20mA?
Yes, the output can be set to 0-5V, 4-20mA, or 1-5V according to your control system requirements.
Q8: What is the minimum order quantity?
MOQ is just 1 unit, allowing you to test the product before larger orders.
Inquiry Information
For technical specifications, pricing, or customization inquiries, please contact:
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