Low-Hydroxyl Quartz Furnace Tube for Oxidation Diffusion Furnaces

Name: "Low-Hydroxyl Quartz Furnace Tube for Oxidation Diffusion Furnaces"
Rating: 5 (85 reviews)

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SKU: 3503636994

Model: quartz furnace tube

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Product Details

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Low-Hydroxyl Quartz Furnace Tube for Oxidation Diffusion Furnaces

This quartz furnace tube is engineered for oxidation and diffusion processes in semiconductor device manufacturing. With hydroxyl content below 5 ppm, it minimizes moisture release during high-temperature operation, ensuring process stability and product yield.

Key Selling Points

Ultra-Low Hydroxyl Content (<5 ppm): Reduces outgassing and improves process consistency, critical for thin film deposition.
High Purity Fused Quartz: Bubble-free and inclusion-free surface minimizes contamination risk in cleanroom environments.
Dimensional Precision: Outer diameter tolerance of ±1.0% or better ensures proper fit in horizontal or vertical furnace systems.
Excellent Sagging Resistance: Optimized for vertical and horizontal orientations, maintaining shape integrity under thermal cycling.
Customizable Dimensions: Diameter and length tailored to match specific furnace configurations, reducing installation time.

Technical Specifications

Parameter	Value
Hydroxyl (OH) Content	< 5 ppm (low-hydroxyl type)
Dimensional Outer Diameter Tolerance	±1.0% or better
Surface Defect Rate	Bubble and inclusion free
Sagging Resistance	Optimized for vertical/horizontal orientations

Models and Options

Available in standard and custom lengths and diameters to fit various furnace models. Contact us for specific tube dimensions.

Materials and Structure

Constructed from high-purity fused quartz, ensuring thermal stability and chemical inertness required for semiconductor processes.

Applications

Ideal for oxidation and diffusion furnaces in semiconductor fabs, particularly in controlled gas phase deposition and thermal cycling environments. Compatible with horizontal and vertical process tube furnaces and LPCVD equipment.

Customization

Custom dimensions including diameter and length, gas-tight sealing joints, and thermal shock resistance options are available to meet specific process requirements.

FAQ

1. What is the maximum operating temperature?

The maximum operating temperature is not specified in the provided information; please contact us for details.

2. Can this tube be used in LPCVD systems?

Yes, it is compatible with LPCVD equipment as it matches the described matched equipment.

3. What is the lead time for custom dimensions?

Lead time depends on order volume and specifications. Contact us for a precise quotation.

4. Do you provide certification for the material?

Our company holds ISO9001, ISO14001, and ISO45001 certificates, ensuring quality management and environmental compliance.

5. What is the minimum order quantity?

The MOQ is 1 unit, as stated in our purchase information.

6. How is the tube packaged for shipment?

Packaging details are not specified, but we ensure safe pre-shipment testing and secure packaging.

7. Can you provide technical drawings?

Yes, we can provide drawings upon request for custom dimensions.

8. What payment terms do you accept?

For new customers: 100% T/T in advance. For long-term cooperation: 70% T/T in advance, 30% before shipment.

Inquiry Information

Contact our sales team for more details and quotations:

Name: Frank

Email: sales05@semi-cera.com

Tel: +86 15957878134

WhatsApp: +86 15957878134

Address: Ningbo, China

Website: www.semi-cera.com

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