Sintered RSiC Cantilever Paddle for Diffusion Furnaces
The SiC-03 cantilever paddle is manufactured using sintered RSiC with a CVD SiC coating, designed for high-temperature oxidation and diffusion processes. Offering a load capacity up to 15 kg, a maximum deflection of ≤2.0 mm at lengths beyond 2000 mm, and a particle-free ground finish, this paddle ensures reliable wafer transfer and extended service life in harsh thermal environments.
Key Selling Points
- High load capacity up to 15 kg at temperatures exceeding 1100°C – Supports heavy wafer loads without deformation, minimizing downtime.
- Deflection ≤2.0 mm even at maximum reach (>2000 mm) – Ensures positional accuracy and wafer safety during long cantilever operations.
- Sintered RSiC core with CVD SiC coating – Provides superior wear resistance and thermal stability, extending component life.
- Ground finish and particle-free surface – Reduces contamination risk in cleanroom and high-purity processes.
- Customizable length (1500–3500 mm) – Adapts to various furnace configurations and process requirements.
Technical Specifications
| Model |
SiC-03 |
| Material |
Sintered RSiC + CVD SiC coating |
| Deflection under load |
≤2.0 mm at maximum reach (>2000 mm) |
| Load capacity |
Up to 15 kg at high temperatures (>1100°C) |
| Surface finish |
Ground finish, particle-free |
| Core matrix |
Sintered RSiC |
Models and Options
Standard model SiC-03 with customizable length (1500–3500 mm) to fit specific furnace geometries. Please contact us for custom lengths and configurations.
Materials and Structure
The core matrix is sintered RSiC, which is then coated with a CVD SiC layer for enhanced surface hardness and chemical resistance. This structure provides a balance of mechanical strength and thermal shock resistance.
Applications
Specifically designed for oxidation and diffusion processes in semiconductor manufacturing, where precise wafer handling under high temperatures is critical.
Customization
We offer customization in length (1500–3500 mm) and other dimensions to meet specific furnace and process requirements. Please consult our engineering team.
Case Studies
North America Epitaxy Application: A US customer uses 900 units per month for epitaxy processes, achieving stable mass production and reducing maintenance downtime by 15%.
Asia-Pacific Epitaxy Application: A Japanese customer uses 200 units per month, achieving ultra-low particle counts and a 2.5% increase in wafer yield.
Europe SiC Crystal Growth: A German customer uses 10,000 units per year to achieve high-quality SiC crystal growth, with zero outgassing and stable operation at 2000°C.
FAQ
- Q: What is the minimum deflection at full load?
A: The deflection is ≤2.0 mm at maximum reach (>2000 mm), ensuring high precision.
- Q: Can the paddle handle loads above 15 kg?
A: The standard design supports up to 15 kg; for higher loads, please contact us for custom engineering.
- Q: What is the maximum operating temperature?
A: It is designed for use above 1100°C, typical for diffusion furnace processes.
- Q: Is the surface finish particle-free?
A: Yes, the ground finish ensures a particle-free surface, critical for contamination control.
- Q: Are custom lengths available?
A: We can customize from 1500 mm to 3500 mm based on your furnace specifications.
- Q: What is the typical lead time?
A: We offer pre-shipment testing and flexible delivery terms; please contact us for specific timelines.
- Q: What quality certifications does Semicera hold?
A: Our manufacturing facilities are ISO9001, ISO14001, and ISO45001 certified.
Inquiry Information
MOQ: 1 unit | Payment: New customers 100% T/T in advance; long-term customers 70% T/T in advance, 30% before shipment. Delivery: EXW/FCA/DAP/DDP. Acceptance: Pre-shipment test.
Contact: Frank | Email: sales05@semi-cera.com | Tel/WhatsApp: +86 15957878134
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